Multilayer white beam study

K. Friedrich; Ch. Morawe; J.-Ch. Peffen; M. Osterhoff

doi:10.1117/12.887000

18 May 2011 Multilayer white beam study

K. Friedrich, Ch. Morawe, J.-Ch. Peffen, M. Osterhoff

Proceedings Volume 8077, Damage to VUV, EUV, and X-ray Optics III; 80770M (2011) https://doi.org/10.1117/12.887000
Event: SPIE Optics + Optoelectronics, 2011, Prague, Czech Republic

Abstract

The degradation mechanisms are a critical issue if multilayers are used as monochromators for white beam synchrotron applications. To quantify the radiation impact x-ray reflectivity measurements before, during, and after white beam exposure were performed. For the in-situ irradiation study a versatile vacuum chamber was developed and tested using a high power undulator source. The device is equipped with a cooling system for the multilayer samples to distinguish thermal effects from pure radiation induced ones. The x-ray reflectivity was measured at fixed angle of incidence in an energy dispersive mode and as a function of time. The energy dispersive detection allows for the simultaneous observation of the multilayer reflectivity spectrum over a wide range. The white beam study includes various long-term exposures with an incoming load up to 250 W. Ex-situ x-ray reflectivity measurements and beam imaging were carried out with monochromatic radiation at 8 keV before and after the white beam exposure. TEM analysis provides complementary information on the layer structure in the stack. Depending on the material system, the total radiation dose, and the sample environment, different degrees of modifications in the multilayer structure were observed.

Citation Download Citation

K. Friedrich, Ch. Morawe, J.-Ch. Peffen, and M. Osterhoff "Multilayer white beam study", Proc. SPIE 8077, Damage to VUV, EUV, and X-ray Optics III, 80770M (18 May 2011); https://doi.org/10.1117/12.887000

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