Surface sensitivity reduction in laser triangulation sensors

Mehdi Daneshpanah; Kevin Harding

doi:10.1117/12.893893

14 September 2011 Surface sensitivity reduction in laser triangulation sensors

Mehdi Daneshpanah, Kevin Harding

Proceedings Volume 8133, Dimensional Optical Metrology and Inspection for Practical Applications; 81330O (2011) https://doi.org/10.1117/12.893893
Event: SPIE Optical Engineering + Applications, 2011, San Diego, California, United States

Abstract

Laser triangulation sensors offer a simple, non-contact and fast solution to measure displacement, position, vibration and thickness. However, these sensors are prone to target surface sensitivity since they rely heavily on a uniform back-scatter of the laser spot. Here, sources of measurement noise including surface texture, speckle, beam deflection and asymmetry are discussed. In addition, a few solutions using dithering as well as the beam shaping to reduce surface sensitivity are explored. It is shown that a simple ditherer would induce additional error and a solution is suggested to compensate for it.

Citation Download Citation

Mehdi Daneshpanah and Kevin Harding "Surface sensitivity reduction in laser triangulation sensors", Proc. SPIE 8133, Dimensional Optical Metrology and Inspection for Practical Applications, 81330O (14 September 2011); https://doi.org/10.1117/12.893893

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