Random rough surface photofabrication

Vincent Brissonneau; Ludovic Escoubas; François Flory; Gérard Berginc

doi:10.1117/12.896217

30 September 2011 Random rough surface photofabrication

Vincent Brissonneau, Ludovic Escoubas, François Flory, Gérard Berginc

Proceedings Volume 8172, Optical Complex Systems: OCS11; 81720H (2011) https://doi.org/10.1117/12.896217
Event: SPIE Optical Systems Design, 2011, Marseille, France

Abstract

Random rough surfaces are of primary interest for their optical properties: reducing reflection at the interface or obtaining specific scattering diagram for example. Thus controlling surface statistics during the fabrication process paves the way to original and specific behaviors of reflected optical waves. We detail an experimental method allowing the fabrication of random rough surfaces showing tuned statistical properties. A two-step photoresist exposure process was developed. In order to initiate photoresist polymerization, an energy threshold needs to be reached by light exposure. This energy is brought by a uniform exposure equipment comprising UV-LEDs. This pre-exposure is studied by varying parameters such as optical power and exposure time. The second step consists in an exposure based on the Gray method.¹ The speckle pattern of an enlarged scattered laser beam is used to insolate the photoresist. A specific photofabrication bench using an argon ion laser was implemented. Parameters such as exposure time and distances between optical components are discussed. Then, we describe how we modify the speckle-based exposure bench to include a spatial light modulator (SLM). The SLM used is a micromirror matrix known as Digital Micromirror Device (DMD) which allows spatial modulation by displaying binary images. Thus, the spatial beam shape can be tuned and so the speckle pattern on the photoresist is modified. As the photoresist photofabricated surface is correlated to the speckle pattern used to insolate, the roughness parameters can be adjusted.

Citation Download Citation

Vincent Brissonneau, Ludovic Escoubas, François Flory, and Gérard Berginc "Random rough surface photofabrication", Proc. SPIE 8172, Optical Complex Systems: OCS11, 81720H (30 September 2011); https://doi.org/10.1117/12.896217

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available