Holographic femtosecond laser processing system with an adaptive control

Yoshio Hayasaki; Satoshi Hasegawa

doi:10.1117/12.906201

23 December 2011 Holographic femtosecond laser processing system with an adaptive control

Yoshio Hayasaki, Satoshi Hasegawa

Proceedings Volume 8204, Smart Nano-Micro Materials and Devices; 82040B (2011) https://doi.org/10.1117/12.906201
Event: SPIE Smart Nano + Micro Materials and Devices, 2011, Melbourne, Australia

Abstract

Holographic femtosecond laser processing is very useful for high-speed processing with low-loss of light. One of important subjects is to design a computer-generated hologram (CGH) with good performance in the processing system. We have proposed a CGH is optimized in the processing system. The latest method is the SH optimization method based on parallel SH generation. The SH method automatically incorporates the pulse duration and spatial beam profile into the CGH, and therefore gives high quality parallel laser processing. Because of the enhanced processing accuracy, smaller structures are processed with the smallest energy. We demonstrate the 18 parallel laser pulses performs the parallel processing on a glass surface with the average diameter of 271nm under the average fluence of 0.88 J/cm².

Citation Download Citation

Yoshio Hayasaki and Satoshi Hasegawa "Holographic femtosecond laser processing system with an adaptive control", Proc. SPIE 8204, Smart Nano-Micro Materials and Devices, 82040B (23 December 2011); https://doi.org/10.1117/12.906201

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available