Vibration errors in phase-shifting interferometer with absolute testing

Xin Jia; Tingwen Xing

doi:10.1117/12.905089

15 November 2011 Vibration errors in phase-shifting interferometer with absolute testing

Xin Jia, Tingwen Xing

Proceedings Volume 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation; 83212M (2011) https://doi.org/10.1117/12.905089
Event: Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 2011, Yunnan, China

Abstract

Requirements for the measurement resolution in the sub-nanometer range have become quite common. Result of the testing contain the reference surface errors and test surface errors in the high-accuracy Phase shifting interferometer (PSI) which test the relative phase between the two surface. The test accuracy can be achieved by removing the error of reference surface. In this case, one of body of so-called absolute tests must be used which can test the systematic errors, including the reference surface, of the instrument to be used to improve the test accuracy. Unexpected mechanical vibrations can significantly degrade the otherwise high accuracy of phase-shifting interferometer. The data acquisition is sensitivity to vibration with a function of the frequency. The influence of the longitudinal vibration is analyzed in this paper. We use Zernike polynomials to generate 3 plats. Then the Matlab is used to simulate the 4 frames phase-shift algorithms and absolute testing algorithms. An experiment used the Zygo interferometer to prove the arithmetic and we can see the vibration errors in the testing.

Citation Download Citation

Xin Jia and Tingwen Xing "Vibration errors in phase-shifting interferometer with absolute testing", Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 83212M (15 November 2011); https://doi.org/10.1117/12.905089

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available