Interferometric study of deformation fields arising at laser treatment of Si surface

Mykola D. Raransky; Vitaliy N. Balazyuk; Mykola I. Melnyk; Bohdan M. Grytsyuk

doi:10.1117/12.917092

22 November 2011 Interferometric study of deformation fields arising at laser treatment of Si surface

Mykola D. Raransky, Vitaliy N. Balazyuk, Mykola I. Melnyk, Bohdan M. Grytsyuk

Proceedings Volume 8338, Tenth International Conference on Correlation Optics; 83380V (2011) https://doi.org/10.1117/12.917092
Event: Correlation Optics 2011, 2011, Chernivsti, Ukraine

Abstract

This work studies displacement and deformation fields in Si arising at radiation with neodymium laser beam of energy ~1 J and pulse duration 10^-3 s. Investigations were performed using moiré fringe method with employment of X-ray interferometer based on the LLL-diffraction pattern.

Citation Download Citation

Mykola D. Raransky, Vitaliy N. Balazyuk, Mykola I. Melnyk, and Bohdan M. Grytsyuk "Interferometric study of deformation fields arising at laser treatment of Si surface", Proc. SPIE 8338, Tenth International Conference on Correlation Optics, 83380V (22 November 2011); https://doi.org/10.1117/12.917092

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