Does your SEM really tell the truth?

Michael T. Postek; András E. Vladár

doi:10.1117/12.917689

14 May 2012 Does your SEM really tell the truth?

Michael T. Postek, András E. Vladár

Proceedings Volume 8378, Scanning Microscopies 2012: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences; 837805 (2012) https://doi.org/10.1117/12.917689
Event: SPIE Defense, Security, and Sensing, 2012, Baltimore, Maryland, United States

Abstract

The scanning electron microscope (SEM) has gone through a tremendous evolution to become a critical tool for many, diverse scientifi c and industrial applications. The high resolution of the SEM is especially useful for qualitative and quantitative applications for both nanotechnology and nanomanufacturing. It is likely that one of the fi rst questions asked when the fi rst scanning electron micrograph was ever taken was: "...how big is that?" The quality of that answer has improved a great deal over the past few years, especially since SEMs are being used as a primary tool on semiconductor processing lines to monitor the manufacturing processes. The needs of semiconductor production prompted a rapid evolution of the instrument and its capabilities. Over the past 20 years or so, instrument manufacturers, through this substantial semiconductor industry investment of research and development (R&D) money, have vastly improved the performance of these instruments. All users have benefi tted from this investment, especially where metrology with an SEM is concerned. But, how good are these data? This presentation will discuss a sub-set of the most important aspects and larger issues associated with imaging and metrology with the SEM. Every user should know, and understand these issues before any critical quantitative work is attempted.

Citation Download Citation

Michael T. Postek and András E. Vladár "Does your SEM really tell the truth?", Proc. SPIE 8378, Scanning Microscopies 2012: Advanced Microscopy Technologies for Defense, Homeland Security, Forensic, Life, Environmental, and Industrial Sciences, 837805 (14 May 2012); https://doi.org/10.1117/12.917689

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available