Research on Micro-Displacement Driving Technology Based on Piezoelectric Ceramic

Bo Hu; Xiaoping Tang; Song Hu; Wei Yan; Zhicheng Hu

doi:10.1117/12.973648

15 October 2012 Research on micro-displacement driving technology based on piezoelectric ceramic

Bo Hu, Xiaoping Tang, Song Hu, Wei Yan, Zhicheng Hu

Proceedings Volume 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems; 84180Z (2012) https://doi.org/10.1117/12.973648
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Piezoelectric ceramic driving power is one critical technology of achieving the piezoelectric ceramic nano-precision positioning, which has been widely used in precision manufacturing, optical instruments, aerospace and other fields. In this paper, piezoelectric ceramic driving power will be summarized on micro-displacement driving technical development and research. The domestic and overseas piezoelectric-driven ways will be compared and control model algorithms will be discussed. Describe the advantages and disadvantages of piezoelectric ceramic driving power in a different driving and control model, and then show the scope of application of driving power.

Citation Download Citation

Bo Hu, Xiaoping Tang, Song Hu, Wei Yan, and Zhicheng Hu "Research on micro-displacement driving technology based on piezoelectric ceramic", Proc. SPIE 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 84180Z (15 October 2012); https://doi.org/10.1117/12.973648

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