Research of communication mechanism based USB in wafer stage of lithography

Zhuang Sheng; Xiaoping Tang; Jinglong Li

doi:10.1117/12.973654

15 October 2012 Research of communication mechanism based USB in wafer stage of lithography

Zhuang Sheng, Xiaoping Tang, Jinglong Li

Proceedings Volume 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems; 841818 (2012) https://doi.org/10.1117/12.973654
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

Lithography occupies an important position in the development of integrated circuits. As a core component - the wafer stage is a high accuracy, real-time and large travel control important equipment, which has a significant impact on lithography alignment accuracy and exposure quality. The complexity of the wafer stage control and the real-time feedback of synchronization errors are the practical needs in high quality communication. As a general-purpose communication device—USB in various fields has a wide application, and its reliability has been sufficiently validated. In this paper, USB is used as data transmission device to achieve entire communication process. Grating data in FPGA is processed and transferred into host computer, and then it is used to do error analysis. Meanwhile the feedback of grating data from FPGA is aimed to promote the stage orientation precision. The host computer transfers data and custom command through USB to monitor the state of stage motion and guarantees the high-precision control.

Citation Download Citation

Zhuang Sheng, Xiaoping Tang, and Jinglong Li "Research of communication mechanism based USB in wafer stage of lithography", Proc. SPIE 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 841818 (15 October 2012); https://doi.org/10.1117/12.973654

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