Fabrication large area photonic crystals with periodic waveguide by one-step holographic lithography based on spatial light modulator

Yongchun Zhong; Jie Ma; Kam Sing Wong; Zhe Chen; Jianying Zhou

doi:10.1117/12.2008759

15 October 2012 Fabrication large area photonic crystals with periodic waveguide by one-step holographic lithography based on spatial light modulator

Yongchun Zhong, Jie Ma, Kam Sing Wong, Zhe Chen, Jianying Zhou

Author Affiliations +

Proceedings Volume 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems; 84181F (2012) https://doi.org/10.1117/12.2008759
Event: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), 2012, Xiamen, China

Abstract

A one-step introduction of functional defects into a photonic crystal (PC) is demonstrated. By using a multi-beam phasecontrolled holographic lithography and a diffracting optical element, large area one dimensional (1D) and two dimensional (2D) PCs with periodic waveguide were fabricated. The uniform area is up to 4 mm2, and tens of waveguide have been introduced in the one dimension and two dimension PC structure. This technique gives rise to a substantial reduction of the fabrication complexity and a significant improvement on the accuracy of the functional defects in photonic crystals. This method can also been used to design and fabricate metamaterials.

Citation Download Citation

Yongchun Zhong, Jie Ma, Kam Sing Wong, Zhe Chen, and Jianying Zhou "Fabrication large area photonic crystals with periodic waveguide by one-step holographic lithography based on spatial light modulator", Proc. SPIE 8418, 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 84181F (15 October 2012); https://doi.org/10.1117/12.2008759

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