On topography characterization of micro-optical elements with large numerical aperture using digital holographic microscopy

K. Liżewski; T. Kozacki; M. Józwik; J. Kostencka

doi:10.1117/12.923047

4 May 2012 On topography characterization of micro-optical elements with large numerical aperture using digital holographic microscopy

K. Liżewski, T. Kozacki, M. Józwik, J. Kostencka

Author Affiliations +

Proceedings Volume 8430, Optical Micro- and Nanometrology IV; 84300G (2012) https://doi.org/10.1117/12.923047
Event: SPIE Photonics Europe, 2012, Brussels, Belgium

Abstract

The paper is devoted to characterization of topography of micro optical elements with very high numerical aperture using digital holographic microscope. For very high numerical aperture we mean the one larger than numerical aperture of optical system conjugating the object plane with the detector plane. In this case the optical system is not capable of capturing any information about micro element areas with high numerical aperture (high shape gradients). In the paper we are presenting method that can be used for recovering high numerical aperture shape from few measurements with digital holographic microscope working in transmission and reflective configuration. We are focusing on metrology of microlenses of high numerical aperture. Within the presented method measurement of tilted object is necessary. When the element is tilted then some of optical field is coming from "new high gradient element area", when the element is tangential the area of high gradient is producing field with numerical aperture larger that numerical aperture of the measurement optical system. In our paper we therefore use data captured for tilted sample in order to reconstruct micro element topography within a region of high numerical aperture. Such data are then defocused to tilted plane and only then can be used for topography reconstruction.

Citation Download Citation

K. Liżewski, T. Kozacki, M. Józwik, and J. Kostencka "On topography characterization of micro-optical elements with large numerical aperture using digital holographic microscopy", Proc. SPIE 8430, Optical Micro- and Nanometrology IV, 84300G (4 May 2012); https://doi.org/10.1117/12.923047

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