Extrinsic calibration of a fringe projection sensor based on a zoom stereo microscope in an automatic multiscale measurement system

Marc Gronle; Wolfram Lyda; Avinash Burla; Wolfgang Osten

doi:10.1117/12.922583

27 April 2012 Extrinsic calibration of a fringe projection sensor based on a zoom stereo microscope in an automatic multiscale measurement system

Marc Gronle, Wolfram Lyda, Avinash Burla, Wolfgang Osten

Author Affiliations +

Proceedings Volume 8430, Optical Micro- and Nanometrology IV; 84300J (2012) https://doi.org/10.1117/12.922583
Event: SPIE Photonics Europe, 2012, Brussels, Belgium

Abstract

Multi scale systems offer the opportunity to balance the conflict between execution time, measurement volume and resolution for the inspection of highly complex surface profiles. An example of such a task is the inspection of gears. At first, the coarse position and form of the specimen is registered by a sensor measuring with comparatively low resolution but a large field of view. Possible defects near to the resolution limit are indicated and new regions of interest for higher resolved measurements are identified. As prerequisite for a successful multi-scale inspection, every sampled data set, acquired in different scales and at varying positions, must be registered in one global data model. This is only possible if the extrinsic coordinate transform from the sensor's internal coordinate system to the common, global coordinate system of the inspected object and its uncertainties are known. In this paper, we present an approach for the extrinsic calibration using the example of a multi-zoom fringe projection sensor mounted on a multi-axes measurement system. Finally we show the measurement result of a gear, where several sampled patches are merged together into one point cloud with the aid of the presented calibration.

Citation Download Citation

Marc Gronle, Wolfram Lyda, Avinash Burla, and Wolfgang Osten "Extrinsic calibration of a fringe projection sensor based on a zoom stereo microscope in an automatic multiscale measurement system", Proc. SPIE 8430, Optical Micro- and Nanometrology IV, 84300J (27 April 2012); https://doi.org/10.1117/12.922583

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