A micro-SPM head array with exchangeable cantilevers

S. Gao; H. Wolff; K. Herrmann; U. Brand; K. Hiller; S. Hahn; A. Sorger; J. Mehner

doi:10.1117/12.922641

4 May 2012 A micro-SPM head array with exchangeable cantilevers

S. Gao, H. Wolff, K. Herrmann, U. Brand, K. Hiller, S. Hahn, A. Sorger, J. Mehner

Proceedings Volume 8430, Optical Micro- and Nanometrology IV; 84301E (2012) https://doi.org/10.1117/12.922641
Event: SPIE Photonics Europe, 2012, Brussels, Belgium

Abstract

In this paper a MEMS based micro-SPM head array is proposed to enhance the performance of the currently available nano-measuring machines and effectively reduce the measurement time for large specimen. It consists of 1 × N ( N = 7 in our case) micro-SPM heads/units, realized in one chip by MEMS technique. And it can be easily extended to a micro- SPM head matrix. The main part of the micro-SPM head is the MEMS-positioning stage, which is realized on the basis of an electrostatic lateral comb-drive actuator. In order to take the advantage of the high lateral resolution of conventional cantilevers, a flexible cantilever gripper was designed to be integrated into the MEMS-positioning stage within the SPM head. Conventional cantilevers can be mechanically mounted onto the MEMS-positioning stage or dismantled from the MEMS-positioning stage after the tip is worn out. In this way, the well-designed and calibrated MEMS-positioning stage can be repeatedly and efficiently utilized. The structure design and simulation of mechanical and electrical performances of the mico-SPM head will be detailed in this paper. First experimental results proved the feasibility of the cantilever gripper design.

Citation Download Citation

S. Gao, H. Wolff, K. Herrmann, U. Brand, K. Hiller, S. Hahn, A. Sorger, and J. Mehner "A micro-SPM head array with exchangeable cantilevers", Proc. SPIE 8430, Optical Micro- and Nanometrology IV, 84301E (4 May 2012); https://doi.org/10.1117/12.922641

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