Sensitivity limits of guided modes in silicon integrated waveguide-based sensors

Oleg Żero; Astrid Aksnes

doi:10.1117/12.999904

30 November 2012 Sensitivity limits of guided modes in silicon integrated waveguide-based sensors

Oleg Żero, Astrid Aksnes

Proceedings Volume 8561, Advanced Sensor Systems and Applications V; 85610P (2012) https://doi.org/10.1117/12.999904
Event: Photonics Asia, 2012, Beijing, China

Abstract

We present a numerical study of the sensitivity of guided modes due to the presence of small mechanical vibrations. Analysis is performed utilising finite elements method (FEM) with help of both 2D and 3D models, where changes to the field distributions associated with the guided modes are computed in order to read the position of a conducting plate suspended over a waveguide. The sensitivity related to the guided modes is analysed and a possibility to improve the sensitivity by combining the sensing effect of several modes is investigated. By utilizing FEM, the optical response to the system is studied in terms of both indiviudal response to the perturbation and the collective response by using the concept of multimode interference (MMI). The preliminary models predict a theoretical sensitivity limit of 2:4 %/nm in terms of normalised power transmission for a MMI of only 4:1 μm length.

Citation Download Citation

Oleg Żero and Astrid Aksnes "Sensitivity limits of guided modes in silicon integrated waveguide-based sensors", Proc. SPIE 8561, Advanced Sensor Systems and Applications V, 85610P (30 November 2012); https://doi.org/10.1117/12.999904

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available