Coordinates calibration in precision detection of 3D optical deformation measurement system

Honggang Lu; Chunsheng Hu; Xingshu Wang; Yang Gao; Wei Wu

doi:10.1117/12.2000586

20 November 2012 Coordinates calibration in precision detection of 3D optical deformation measurement system

Honggang Lu, Chunsheng Hu, Xingshu Wang, Yang Gao, Wei Wu

Proceedings Volume 8563, Optical Metrology and Inspection for Industrial Applications II; 856307 (2012) https://doi.org/10.1117/12.2000586
Event: Photonics Asia, 2012, Beijing, China

Abstract

In order to validate the detection precision of a three Dimensions Optical Deformation Measure System (3D-OMS), a calibration method of auxiliary coordinate and the optical coordinate base on theodolites has been proposed. The installation method by using theodolites to calibrate the auxiliary coordinate and the optical coordinate has been proposed. Specifically, after the auxiliary mirrors installed, the installation accuracy is detected, then we analyzed the influence of Axis-Error of theodolite under the practical condition of our experiment. Furthermore, the influence of validation precision for the 3D-OMS caused by the misalignment of auxiliary coordinate and optical coordinate is analyzed. According to our theoretical analysis and experiments results, the validation precision of the 3D-OMS can achieve an accuracy of 1″ at the conditions of the coordinate alignment accuracy is no more than 10′ and the measuring range of 3D-OMS within ±3′. Therefore, the proposed method can meet our high accuracy requirement while not sensitive to the installation error of auxiliary mirrors. This method is also available for other similar work.

Citation Download Citation

Honggang Lu, Chunsheng Hu, Xingshu Wang, Yang Gao, and Wei Wu "Coordinates calibration in precision detection of 3D optical deformation measurement system", Proc. SPIE 8563, Optical Metrology and Inspection for Industrial Applications II, 856307 (20 November 2012); https://doi.org/10.1117/12.2000586

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