Spindle error motion measurement using concentric circle grating and phase modulation interferometers

M. Aketagawa; M. Madden; S. Uesugi; T. Kumagai; Y. Maeda; E. Okuyama

doi:10.1117/12.2000812

20 November 2012 Spindle error motion measurement using concentric circle grating and phase modulation interferometers

M. Aketagawa, M. Madden, S. Uesugi, T. Kumagai, Y. Maeda, E. Okuyama

Proceedings Volume 8563, Optical Metrology and Inspection for Industrial Applications II; 85630C (2012) https://doi.org/10.1117/12.2000812
Event: Photonics Asia, 2012, Beijing, China

Abstract

In the conventional methods to measure radial, axial and angular motions of spindles, complicated artifacts with relative large volume (such as two balls linked with a cylinder) are required. Small volume artifact is favorable from the viewpoint of the accurate and practical measurement of the spindle motion. This paper describes a concurrent measurement of spindle radial, axial and angular motions using concentric circle grating and phase modulation interferometers. In the measurement, the concentric circle grating with fine pitch is installed on top of the spindle of interest. The grating is a reference artifact in the method. Three optical sensors are fixed over the concentric circle grating, and observe the proper positions of the grating. The optical sensor consists of a frequency modulated laser diode as a light source, and two interferometers. One interferometer observes an interference fringe between reflected light form a fixed mirror and 0-th order diffraction light from the grating to measure the axial motion. Another interferometer observes an interference fringe between ±2nd diffraction lights from the grating to measure the radial motion. Using three optical sensors, three radial displacements and three axial displacements of the proper observed position of the grating can be measured. From these measured displacements, radial, axial and angular motions of the spindle can be calculated concurrently. In the paper, a measurement instrument, a novel fringe interpolation technique by sinusoidal phase modulation and experimental results are discussed.

Citation Download Citation

M. Aketagawa, M. Madden, S. Uesugi, T. Kumagai, Y. Maeda, and E. Okuyama "Spindle error motion measurement using concentric circle grating and phase modulation interferometers", Proc. SPIE 8563, Optical Metrology and Inspection for Industrial Applications II, 85630C (20 November 2012); https://doi.org/10.1117/12.2000812

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