Use of ellipsometer to determine the optical properties of the satellite surface coated materials

Yanhui Li; Zhensen Wu; Lu Bai

doi:10.1117/12.999870

26 November 2012 Use of ellipsometer to determine the optical properties of the satellite surface coated materials

Yanhui Li, Zhensen Wu, Lu Bai

Proceedings Volume 8563, Optical Metrology and Inspection for Industrial Applications II; 856315 (2012) https://doi.org/10.1117/12.999870
Event: Photonics Asia, 2012, Beijing, China

Abstract

Ellipsometer enables to characterize optical properties of materials and thin films quantitatively via the measurement of the ellipsometric parameters, Psi (Ψ) and Delta (Δ), of the reflected polarized light by specimen. The ellipsometry surgery began to be applied to an increasingly wide range of areas, such as physics, chemistry, materials and biology. The main advantage of the elliptical polarization measurement technique is to measure a long time, take a large wavelength range, the measurement angle, no damage to the sample, measurement results are accurate. By the principle analysis of the ellipsometer, In this paper ellipsometer is used to measurement electric field component amplitude ratio Ψ and electric field component phase difference Δ of the satellite surface coated materials, and then set the angle of incidence and wavelength, the optical constants (index of refractive n and extinction coefficient k) can be obtained. On the measurement results in different incident in an optimization modeling, also has access to more parameters description. The experiments show that the measurement results and fitting results match well within the spectral range 300 nm-1000 nm range. This paper is offer methods of measurement and modeling for characterize optical properties of materials and thin films.

Citation Download Citation

Yanhui Li, Zhensen Wu, and Lu Bai "Use of ellipsometer to determine the optical properties of the satellite surface coated materials", Proc. SPIE 8563, Optical Metrology and Inspection for Industrial Applications II, 856315 (26 November 2012); https://doi.org/10.1117/12.999870

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
6 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Satellites

Reflectivity

Silver

Optical testing

Refractive index

Data modeling

Ellipsometry

Show All Keywords

Keywords/Phrases

Search In:

Publication Years