Sub-20nm lithography negative tone chemically amplified resists using cross-linker additives

Prashant K. Kulshreshtha; Ken Maruyama; Sara Kiani; Scott Dhuey; Pradeep Perera; James Blackwell; Deirdre Olynick; Paul D. Ashby

doi:10.1117/12.2011640

29 March 2013 Sub-20nm lithography negative tone chemically amplified resists using cross-linker additives

Prashant K. Kulshreshtha, Ken Maruyama, Sara Kiani, Scott Dhuey, Pradeep Perera, James Blackwell, Deirdre Olynick, Paul D. Ashby

Author Affiliations +

Proceedings Volume 8682, Advances in Resist Materials and Processing Technology XXX; 86820N (2013) https://doi.org/10.1117/12.2011640
Event: SPIE Advanced Lithography, 2013, San Jose, California, United States

Abstract

Here, we report the highest recorded resolution for a negative-tone, carbon-based, chemically amplified (CA) resist of 20 nm half-pitch (HP) using both E-beam and EUV exposure systems. The new chemistry incorporates variable amounts of oxetane (0, 5, 10 and 20%) cross-linker into a base of Noria-MAd (methyl-admantane) molecular resist. Cross-linkable resists showed simultaneous improvements in surface energy, structural integrity, and swelling to ensure collapse free 20nm HP patterns and line-edge roughness (LER) down to 2.3 nm. EUV exposed Noria-Ox (5%) cross-linked resist patterns demonstrated 5 times improvement in Z-factor (for 24 nm HP) over Noria-MAd alone.

Citation Download Citation

Prashant K. Kulshreshtha, Ken Maruyama, Sara Kiani, Scott Dhuey, Pradeep Perera, James Blackwell, Deirdre Olynick, and Paul D. Ashby "Sub-20nm lithography negative tone chemically amplified resists using cross-linker additives", Proc. SPIE 8682, Advances in Resist Materials and Processing Technology XXX, 86820N (29 March 2013); https://doi.org/10.1117/12.2011640

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available