Paper
29 March 2013 An automated resource management system to improve production tapeout turn-around time
Eric Guo, Qingwei Liu, Sherry Zhu, Jason Wu, Jenny Tsai, Junwei Lu, Mark C. Simmons
Author Affiliations +
Abstract
In today’s semiconductor industry, both the pure-play and independent device manufacturer (IDM) foundries are constantly and rigorously competing for market share. The acknowledged benefit for customers who partner with these foundries includes a reduced cost-of-ownership, along with the underwritten agreement of meeting or exceeding an aggressive time-to-market schedule. Because the Semiconductor Manufacturing International Corporation (SMIC) is one of the world-wide forerunners in the foundry industry, one of its primary concerns is ensuring continual improvement in its fab’s turnaround time (TAT), especially given that newer technology nodes and their associated processes are increasing in complexity, and consequently, in their time-to-process. In assessing current runtime data trends at the 65nm and 40nm technology nodes, it was hypothesized that hardware and software utilization improvements could accomplish a reduced overall TAT. By running an experiment using the Mentor Graphics Calibre® Cluster Manager (CalCM) software, SMIC was able to demonstrate just over a 30% aggregate TAT improvement in conjunction with a greater than 90% average utilization of all hardware resources. This paper describes the experimental setup and procedures that predicated the reported results.
© (2013) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eric Guo, Qingwei Liu, Sherry Zhu, Jason Wu, Jenny Tsai, Junwei Lu, and Mark C. Simmons "An automated resource management system to improve production tapeout turn-around time", Proc. SPIE 8684, Design for Manufacturability through Design-Process Integration VII, 86840P (29 March 2013); https://doi.org/10.1117/12.2011231
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KEYWORDS
Manufacturing

Visualization

Optical proximity correction

Semiconductor manufacturing

Semiconductors

Algorithm development

Ions

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