A µ-biomimetic uncooled infrared sensor

Georg Siebke; Peter Holik; Sam Schmitz; Manfred Lacher; Siegfried Steltenkamp

doi:10.1117/12.2008951

8 April 2013 A μ-biomimetic uncooled infrared sensor

Georg Siebke, Peter Holik, Sam Schmitz, Manfred Lacher, Siegfried Steltenkamp

Proceedings Volume 8686, Bioinspiration, Biomimetics, and Bioreplication 2013; 86860D (2013) https://doi.org/10.1117/12.2008951
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2013, San Diego, California, United States

Abstract

The beetle Melanophila acuminata detects forest fires from distances of about 80 miles. For the detection of fires, the beetle uses specialized infrared-sensing receptors. Inspired by this extremely sensitive natural device, we are developing an uncooled IR sensor. The beetle’s IR receptors are based on a fluid-filled pressure cell. By absorbing IR radiation, the fluid heats up and expands. The receptor senses the ensuing pressure increase using a mechanoreceptor. To discriminate between fast but small pressure signals, evoked by a distant heat source and slow but large background signals, due to changes in ambient temperature, the beetle has developed a sophisticated compensation mechanism. Our sensor will feature a size of a few mm² and is fabricated using MEMS technology. The sensor uses the same mechanism as the beetle’s IR receptor, except for pressure sensing. The pressure increase inside the pressure cell deflects a membrane on top of which one electrode of a plate capacitor is located; this evokes changes in capacitance of a few fF (10⁻¹⁵ F). A long and narrow channel connects the pressure cell to a compensation chamber. To the outside, this chamber is sealed by a thin and elastic PDMS membrane. The channel enables the slow transfer of fluid to the compensation chamber while the thin membrane maintains the pressure inside this chamber close to the ambient pressure. Without this mechanism, the pressure inside the capacitor chamber would rise slowly due to ambient temperature changes and finally destroy the sensor.

Citation Download Citation

Georg Siebke, Peter Holik, Sam Schmitz, Manfred Lacher, and Siegfried Steltenkamp "A μ-biomimetic uncooled infrared sensor", Proc. SPIE 8686, Bioinspiration, Biomimetics, and Bioreplication 2013, 86860D (8 April 2013); https://doi.org/10.1117/12.2008951

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