Contact aiming system of 2m laser automatic interferometric comparator

Shuanghua Sun; Xiaoyou Ye; Lingding Zou; Hongtang Gao; Xiaochuan Gan; Xueping Shen

doi:10.1117/12.2014877

31 January 2013 Contact aiming system of 2m laser automatic interferometric comparator

Shuanghua Sun, Xiaoyou Ye, Lingding Zou, Hongtang Gao, Xiaochuan Gan, Xueping Shen

Proceedings Volume 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation; 875907 (2013) https://doi.org/10.1117/12.2014877
Event: International Symposium on Precision Engineering Measurement and Instrumentation 2012, 2012, Chengdu, China

Abstract

Composition and principle of 2m laser automatic interferometric comparator were introduced. A novel contact aiming system based on high precision inductance sensor was designed. The zero-cross trigger signal of inductance sensor output voltage was treated as the aiming signal. A rotating mechanism was designed and a segmental shifting motion control model was established. Two key problems, avoiding probe crash and aiming repeatability, were solved. The one dimension end standards such as gauge block, step gauge could be measured directly by this means. The data of test revealed that aiming repeatability was less than 0.2μm.

Citation Download Citation

Shuanghua Sun, Xiaoyou Ye, Lingding Zou, Hongtang Gao, Xiaochuan Gan, and Xueping Shen "Contact aiming system of 2m laser automatic interferometric comparator", Proc. SPIE 8759, Eighth International Symposium on Precision Engineering Measurement and Instrumentation, 875907 (31 January 2013); https://doi.org/10.1117/12.2014877

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