Effect of polishing plane vibration on large-size optical workpieces in continuous polishing

Haiyang Shan; Chaoyang Wei; Xueke Xu; Hongbo He; Shijie Liu; Yingfeng Li; Kui Yi; Jianda Shao

doi:10.1117/12.2032540

15 October 2013 Effect of polishing plane vibration on large-size optical workpieces in continuous polishing

Haiyang Shan, Chaoyang Wei, Xueke Xu, Hongbo He, Shijie Liu, Yingfeng Li, Kui Yi, Jianda Shao

Proceedings Volume 8884, Optifab 2013; 88841S (2013) https://doi.org/10.1117/12.2032540
Event: SPIE Optifab, 2013, Rochester, New York, United States

Abstract

Effect of the polishing plane vibration on large-size optical workpieces in continuous polishing is studied. The vibration equation was deduced based on the existence of inclination between the polishing plane and z-axis direction. Influences of different parameters, such as the inclination, rotation speeds of the polishing plane and workpiece, the eccentricity and workpiece radius, on the polishing plane vibration were simulated. The simulations results show that rotation speeds of the polishing plane and workpiece is the most significant factor. The chaotic vibration of the polishing plane increases with increasing rotation speeds differences between the polishing plane and workpiece. When differences are small, periodic ups and downs of the polishing plane occur with the increase of polishing time. Experiments verified the influence of rotation speeds differences on the polishing plane vibration. The vibration affects PV of large-size optical workpieces in continuous polishing.

Citation Download Citation

Haiyang Shan, Chaoyang Wei, Xueke Xu, Hongbo He, Shijie Liu, Yingfeng Li, Kui Yi, and Jianda Shao "Effect of polishing plane vibration on large-size optical workpieces in continuous polishing", Proc. SPIE 8884, Optifab 2013, 88841S (15 October 2013); https://doi.org/10.1117/12.2032540

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available