Tilt angle measurement with a Gaussian-shaped laser beam tracking

Martin Šarbort; Šimon Řeřucha; Petr Jedlička; Josef Lazar; Ondrej Číp

doi:10.1117/12.2052880

1 May 2014 Tilt angle measurement with a Gaussian-shaped laser beam tracking

Martin Šarbort, Šimon Řeřucha, Petr Jedlička, Josef Lazar, Ondrej Číp

Proceedings Volume 9132, Optical Micro- and Nanometrology V; 91321E (2014) https://doi.org/10.1117/12.2052880
Event: SPIE Photonics Europe, 2014, Brussels, Belgium

Abstract

We have addressed the challenge to carry out the angular tilt stabilization of a laser guiding mirror which is intended to route a laser beam with a high energy density. Such an application requires good angular accuracy as well as large operating range, long term stability and absolute positioning. We have designed an instrument for such a high precision angular tilt measurement based on a triangulation method where a laser beam with Gaussian profile is reflected off the stabilized mirror and detected by an image sensor. As the angular deflection of the mirror causes a change of the beam spot position, the principal task is to measure the position on the image chip surface. We have employed a numerical analysis of the Gaussian intensity pattern which uses the nonlinear regression algorithm. The feasibility and performance of the method were tested by numeric modeling as well as experimentally. The experimental results indicate that the assembled instrument achieves a measurement error of 0.13 microradian in the range ±0.65 degrees over the period of one hour. This corresponds to the dynamic range of 1:170 000.

Citation Download Citation

Martin Šarbort, Šimon Řeřucha, Petr Jedlička, Josef Lazar, and Ondrej Číp "Tilt angle measurement with a Gaussian-shaped laser beam tracking", Proc. SPIE 9132, Optical Micro- and Nanometrology V, 91321E (1 May 2014); https://doi.org/10.1117/12.2052880

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