Technique for AFM tip characterization

Ndubuisi G. Orji; Hiroshi Itoh; Chunmei Wang; Ronald G. Dixson

doi:10.1117/12.2062759

8 September 2014 Technique for AFM tip characterization

Ndubuisi G. Orji, Hiroshi Itoh, Chunmei Wang, Ronald G. Dixson

Proceedings Volume 9173, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII; 917305 (2014) https://doi.org/10.1117/12.2062759
Event: SPIE NanoScience + Engineering, 2014, San Diego, California, United States

Abstract

In atomic force microscopy (AFM) metrology, the scanning tip is a major source of uncertainty. Images taken with an AFM show an apparent broadening of feature dimensions due to the finite size of the tip. An AFM image is a combination of the feature shape, the tip geometry and details of the tip-sample interaction. Here we describe the use of a new multi-feature characterizer for CD-AFM tip, and report initial measurement results. The results are compared with those obtained from the current tip characterizer.

Citation Download Citation

Ndubuisi G. Orji, Hiroshi Itoh, Chunmei Wang, and Ronald G. Dixson "Technique for AFM tip characterization", Proc. SPIE 9173, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII, 917305 (8 September 2014); https://doi.org/10.1117/12.2062759

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