Femtosecond laser microchannels fabrication based on electrons dynamics control using temporally or spatially shaped pulses

Xueliang Yan; Jie Hu; Xiaowei Li; Bo Xia; Pengjun Liu; Yongfeng Lu; Lan Jiang

doi:10.1117/12.2071591

18 November 2014 Femtosecond laser microchannels fabrication based on electrons dynamics control using temporally or spatially shaped pulses

Xueliang Yan, Jie Hu, Xiaowei Li, Bo Xia, Pengjun Liu, Yongfeng Lu, Lan Jiang

Author Affiliations +

Proceedings Volume 9266, High-Power Lasers and Applications VII; 92660T (2014) https://doi.org/10.1117/12.2071591
Event: SPIE/COS Photonics Asia, 2014, Beijing, China

Abstract

With ultrashort pulse durations and ultrahigh power densities, femtosecond laser presents unique advantages of high precision and high quality fabrication of microchannels in transparent materials. In our study, by shaping femtosecond laser pulse energy distribution in temporal or spatial domains, localized transient electrons dynamics and the subsequent processes, such as phase changes, can be controlled, leading to the dramatic increases in the capability of femtosecond laser microchannels fabrication. The temporally shaped femtosecond laser pulse trains can significantly enhance the material removal rate in both water-assisted femtosecond laser drilling and femtosecond laser irradiation followed by chemical etching. Besides, high-aspect-ratio and small-diameter microchannels are drilled by spatially shaped femtosecond laser pulses.

Citation Download Citation

Xueliang Yan, Jie Hu, Xiaowei Li, Bo Xia, Pengjun Liu, Yongfeng Lu, and Lan Jiang "Femtosecond laser microchannels fabrication based on electrons dynamics control using temporally or spatially shaped pulses", Proc. SPIE 9266, High-Power Lasers and Applications VII, 92660T (18 November 2014); https://doi.org/10.1117/12.2071591

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available