A novel porous silicon-based multilayer dielectric-grating structures for diffraction-based sensing

Jiaqing Mo; Yajun Liu; Changwu Lv; Xiaoyi Lv; Zhenhong Jia

doi:10.1117/12.2071350

11 November 2014 A novel porous silicon-based multilayer dielectric-grating structures for diffraction-based sensing

Jiaqing Mo, Yajun Liu, Changwu Lv, Xiaoyi Lv, Zhenhong Jia

Proceedings Volume 9274, Advanced Sensor Systems and Applications VI; 927419 (2014) https://doi.org/10.1117/12.2071350
Event: SPIE/COS Photonics Asia, 2014, Beijing, China

Abstract

Porous silicon material and device has attracted more attention for use as biochemical optical sensors. In this paper, A novel porous silicon-based multilayer dielectric-grating structures by adding high-reflectivity porous silicon stacks between the substrate and grating was fabricated, and the porous silicon grating height was set to be about 200 nm, the grating period was 4 μm, the air filling factor was 50%. A new better method of preparing this porous silicon-based multilayer dielectric-grating structures have also been employed.

Citation Download Citation

Jiaqing Mo, Yajun Liu, Changwu Lv, Xiaoyi Lv, and Zhenhong Jia "A novel porous silicon-based multilayer dielectric-grating structures for diffraction-based sensing", Proc. SPIE 9274, Advanced Sensor Systems and Applications VI, 927419 (11 November 2014); https://doi.org/10.1117/12.2071350

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