Terahertz properties of metallic checkerboard patterns and related structures

Yoku Tanaka; Keisuke Takano; Yuichiro Okui; Abdallah Chahadih; Abbas Ghaddar; Xiang-Lei Han; François Vaurette; Tahsin Akalin; Fumiaki Miyamaru; Willie J Padilla; Masanori Hangyo

doi:10.1117/12.2073672

11 November 2014 Terahertz properties of metallic checkerboard patterns and related structures

Yoku Tanaka, Keisuke Takano, Yuichiro Okui, Abdallah Chahadih, Abbas Ghaddar, Xiang-Lei Han, François Vaurette, Tahsin Akalin, Fumiaki Miyamaru, Willie J Padilla, Masanori Hangyo

Author Affiliations +

Proceedings Volume 9275, Infrared, Millimeter-Wave, and Terahertz Technologies III; 92750B (2014) https://doi.org/10.1117/12.2073672
Event: SPIE/COS Photonics Asia, 2014, Beijing, China

Abstract

A critical electromagnetic response of a self-complementary structure was investigated. The nearly perfect selfcomplementary checkerboard patterns were fabricated by the electron-beam lithography and their electromagnetic responses are measured in the terahertz region. The electromagnetic responses are affected drastically by the small structural difference even though the differences are less than 0.1% of the wavelength of the incident electromagnetic waves. The sample most close to the self-complementary checkerboard pattern shows a less frequency dependent response, which is expected for the self-complementary structures. In this sample, the metallic squares seem to be connected randomly from the SEM observation. The effect of the structural randomness in metal mesh structures is also investigated to obtain the common electromagnetic properties in randomly connected systems.

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Yoku Tanaka, Keisuke Takano, Yuichiro Okui, Abdallah Chahadih, Abbas Ghaddar, Xiang-Lei Han, François Vaurette, Tahsin Akalin, Fumiaki Miyamaru, Willie J Padilla, and Masanori Hangyo "Terahertz properties of metallic checkerboard patterns and related structures", Proc. SPIE 9275, Infrared, Millimeter-Wave, and Terahertz Technologies III, 92750B (11 November 2014); https://doi.org/10.1117/12.2073672

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KEYWORDS

Metals

Electromagnetism

Terahertz radiation

Scanning electron microscopy

Lithography

Silicon

Absorption

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