High-frequency angular vibration calibration using the mirror assembly diffraction grating heterodyne laser interferometer

Jingfeng Xue; Dazhi Zhang; Xinliang Li; Weiqian Zhao

doi:10.1117/12.2067780

18 September 2014 High-frequency angular vibration calibration using the mirror assembly diffraction grating heterodyne laser interferometer

Jingfeng Xue, Dazhi Zhang, Xinliang Li, Weiqian Zhao

Author Affiliations +

Proceedings Volume 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 928219 (2014) https://doi.org/10.1117/12.2067780
Event: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2014), 2014, Harbin, China

Abstract

In order to improve the dynamic evaluating capabilities of the inertial devices and realize the traceability in angular vibration, the angular vibration calibration devices are developed and it is very important to measure the angular vibration accurately for calibration devices. In this paper, a new diffraction grating heterodyne laser interferometer method was introduced for high-frequency and micro-amplitude angular-vibration measurement, which uses a differential and symmetrical optical-path arrangement. The proposed method has the advantages of high-precision, high anti-interference and convenient debugging, and could achieve the angular measurement resolution within 0.02″.

Citation Download Citation

Jingfeng Xue, Dazhi Zhang, Xinliang Li, and Weiqian Zhao "High-frequency angular vibration calibration using the mirror assembly diffraction grating heterodyne laser interferometer", Proc. SPIE 9282, 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 928219 (18 September 2014); https://doi.org/10.1117/12.2067780

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