Simulation on measurement of five-DOF motion errors of high precision spindle with cylindrical capacitive sensor

Min Zhang; Wen Wang; Kui Xiang; Keqing Lu; Zongwei Fan

doi:10.1117/12.2180823

6 March 2015 Simulation on measurement of five-DOF motion errors of high precision spindle with cylindrical capacitive sensor

Min Zhang, Wen Wang, Kui Xiang, Keqing Lu, Zongwei Fan

Author Affiliations +

Proceedings Volume 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation; 94461L (2015) https://doi.org/10.1117/12.2180823
Event: International Symposium on Precision Engineering Measurement and Instrumentation, 2014, Changsha/Zhangjiajie, China

Abstract

This paper describes a novel cylindrical capacitive sensor (CCS) to measure the spindle five degree-of-freedom (DOF) motion errors. The operating principle and mathematical models of the CCS are presented. Using Ansoft Maxwell software to calculate the different capacitances in different configurations, structural parameters of end face electrode are then investigated. Radial, axial and tilt motions are also simulated by making comparisons with the given displacements and the simulation values respectively. It could be found that the proposed CCS has a high accuracy for measuring radial motion error when the average eccentricity is about 15 μm. Besides, the maximum relative error of axial displacement is 1.3% when the axial motion is within [0.7, 1.3] mm, and the maximum relative error of the tilt displacement is 1.6% as rotor tilts around a single axis within [-0.6, 0.6]^°. Finally, the feasibility of the CCS for measuring five DOF motion errors is verified through simulation and analysis.

Citation Download Citation

Min Zhang, Wen Wang, Kui Xiang, Keqing Lu, and Zongwei Fan "Simulation on measurement of five-DOF motion errors of high precision spindle with cylindrical capacitive sensor", Proc. SPIE 9446, Ninth International Symposium on Precision Engineering Measurement and Instrumentation, 94461L (6 March 2015); https://doi.org/10.1117/12.2180823

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