Calibration of the amplification coefficient in interference microscopy by means of a wavelength standard

Peter de Groot; Jake Beverage

doi:10.1117/12.2184975

21 June 2015 Calibration of the amplification coefficient in interference microscopy by means of a wavelength standard

Peter de Groot, Jake Beverage

Proceedings Volume 9526, Modeling Aspects in Optical Metrology V; 952610 (2015) https://doi.org/10.1117/12.2184975
Event: SPIE Optical Metrology, 2015, Munich, Germany

Abstract

We propose an in situ method for establishing the amplification coefficient (height scale) for an interference microscope as an alternative to the traditional step height standard technique for routine calibration. The method begins by determining the properties of the microscope illuminator equipped with a narrow-band spectral filter, using a spectrometer to provide traceability to the 546.074nm ¹⁹⁸Hg line. A data acquisition with the interference microscope links this wavelength standard to a calibration of the properties of the optical path length scanning mechanism of the interferometer. A capacitance sensor in the scanner maintains this calibration for subsequent measurements. A targeted k=1 uncertainty of 0.1% is favorable when compared to calibration using physical artifacts, and the calibration procedure is easier to perform and less sensitive to operator error.

Citation Download Citation

Peter de Groot and Jake Beverage "Calibration of the amplification coefficient in interference microscopy by means of a wavelength standard", Proc. SPIE 9526, Modeling Aspects in Optical Metrology V, 952610 (21 June 2015); https://doi.org/10.1117/12.2184975

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