Laser velocimetry for measurement of non-sinusoidal vibration in sub-nanometer scale without lock-in amplifiers

How-foo Chen; Rung-Fu Lin; Wei-Lun Chiang

doi:10.1117/12.2187894

20 August 2015 Laser velocimetry for measurement of non-sinusoidal vibration in sub-nanometer scale without lock-in amplifiers

How-foo Chen, Rung-Fu Lin, Wei-Lun Chiang

Author Affiliations +

Proceedings Volume 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII; 955612 (2015) https://doi.org/10.1117/12.2187894
Event: SPIE Nanoscience + Engineering, 2015, San Diego, California, United States

Abstract

Laser velocimetry capable of measuring nanoscale motion or displacement normal to vibrational surface is always important in industry and scientific applications. However, measurement sensitivity down to sub-nanometer scale is always a challenge, and utilization of lock-in amplifiers is unavoidable. Measurement is then also limited to single-point detection. Here we report a laser Doppler velocimetry capable of non-contact detection in sub-nanometer scale down to sub-Hertz frequency in a Mach-Zehnder configuration without lock-in amplifiers. Environment perturbation in tens of nanometer scale can be removed by empirical mode decomposition. Lack of lock-in amplifiers promises this technology not limited to single-point detection.

Conference Presentation

Citation Download Citation

How-foo Chen, Rung-Fu Lin, and Wei-Lun Chiang "Laser velocimetry for measurement of non-sinusoidal vibration in sub-nanometer scale without lock-in amplifiers", Proc. SPIE 9556, Nanoengineering: Fabrication, Properties, Optics, and Devices XII, 955612 (20 August 2015); https://doi.org/10.1117/12.2187894

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