Beam conditioning multilayer optics for laboratory x-ray sources

Yuriy Platonov; Boris Verman; Licai Jiang; Bonglea Kim

doi:10.1117/12.2196352

26 August 2015 Beam conditioning multilayer optics for laboratory x-ray sources

Yuriy Platonov, Boris Verman, Licai Jiang, Bonglea Kim

Proceedings Volume 9590, Advances in Laboratory-based X-Ray Sources, Optics, and Applications IV; 95900B (2015) https://doi.org/10.1117/12.2196352
Event: SPIE Optical Engineering + Applications, 2015, San Diego, California, United States

Abstract

Practically, all modern x-ray diffractometers, SAXS, TXRF systems and many other laboratory X-ray instruments are equipped with multilayer X-ray optics. It is due to a much higher flux these instruments have comparing with those having no optics or having a grazing incidence optics without multilayer coatings. There are variety of the multilayer optics designs – from one bounce collimating parabolic mirror to four corners double bounce focusing mirrors. Design of multilayer optics depends on application, X-ray source parameters, requirements on divergence, focal spot, available room for the optics, manufacturing capability and cost. Key characteristics of the optics, requirements on multilayers d-spacing accuracy, optics slope errors, and substrates surface roughness are discussed in the paper. Different optics designs are considered including recently developed optics for a laboratory topography system and a Hybrid optics combining multilayer and crystal optics for XRR and XRD.

Citation Download Citation

Yuriy Platonov, Boris Verman, Licai Jiang, and Bonglea Kim "Beam conditioning multilayer optics for laboratory x-ray sources", Proc. SPIE 9590, Advances in Laboratory-based X-Ray Sources, Optics, and Applications IV, 95900B (26 August 2015); https://doi.org/10.1117/12.2196352

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