The simulation of workpieces' surface in polishing

Lunzhe Wu; Xueke Xu; Minghong Yang; Chaoyang Wei; Shijie Liu; Jianda Shao

doi:10.1117/12.2218456

12 October 2015 The simulation of workpieces' surface in polishing

Lunzhe Wu, Xueke Xu, Minghong Yang, Chaoyang Wei, Shijie Liu, Jianda Shao

Proceedings Volume 9633, Optifab 2015; 96332P (2015) https://doi.org/10.1117/12.2218456
Event: SPIE Optifab, 2015, Rochester, New York, United States

Abstract

Dynamic Mechanical Analysis (DMA) and Bending Beam Rheometer (BBR) are applied to detect the property of the polishing pitch and get the creep compliance combining the craftwork of polishing. The simulation of workpieces’ surface in polishing is completed based on the Preston formula, Boltzmann superposition principle and Boltzmann superposition principle. A V-curve is gotten on studying the PV’s time history of the polished workpiece. Meanwhile, a confirmatory experiment whose parameter is agree with the simulation is completed, which the optimum result of PV, 0.3λ (λ=623.8nm) is similar with the optimum result of PV by simulation, 0.27 λ. A resemble simulated surface is gotten on the same PV with the experiment.

Citation Download Citation

Lunzhe Wu, Xueke Xu, Minghong Yang, Chaoyang Wei, Shijie Liu, and Jianda Shao "The simulation of workpieces' surface in polishing", Proc. SPIE 9633, Optifab 2015, 96332P (12 October 2015); https://doi.org/10.1117/12.2218456

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