Misalignment tolerant efficient inverse taper coupler for silicon waveguide

Peng Wang; Aron Michael; Chee Yee Kwok; Ssu-Han Chen

doi:10.1117/12.2202494

22 December 2015 Misalignment tolerant efficient inverse taper coupler for silicon waveguide

Peng Wang, Aron Michael, Chee Yee Kwok, Ssu-Han Chen

Proceedings Volume 9668, Micro+Nano Materials, Devices, and Systems; 96682B (2015) https://doi.org/10.1117/12.2202494
Event: SPIE Micro+Nano Materials, Devices, and Applications, 2015, Sydney, New South Wales, Australia

Abstract

This paper describes an efficient fiber to submicron silicon waveguide coupling based on an inversely tapered silicon waveguide embedded in a SiO₂ waveguide that is suspended in air. The inverse taper waveguide consist of a 50um long and 240nm thick silicon that linearly taper in width from 500nm to 120nm, which is embedded in SiO₂. The SiO₂ waveguide is 6um wide and 10um long. The simulation results show that the coupling loss of this new approach is 2.7dB including the interface loss at the input and output. The tolerance to fiber misalignment at the input of the coupler is 2um in both horizontal and vertical directions for only 1.5dB additional loss.

Citation Download Citation

Peng Wang, Aron Michael, Chee Yee Kwok, and Ssu-Han Chen "Misalignment tolerant efficient inverse taper coupler for silicon waveguide", Proc. SPIE 9668, Micro+Nano Materials, Devices, and Systems, 96682B (22 December 2015); https://doi.org/10.1117/12.2202494

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available