A scanning measurement method of the pitch of grating based on photoelectric microscope

Hongtang Gao; Zhongyu Wang; Hao Wang

doi:10.1117/12.2199664

15 October 2015 A scanning measurement method of the pitch of grating based on photoelectric microscope

Hongtang Gao, Zhongyu Wang, Hao Wang

Proceedings Volume 9671, AOPC 2015: Advances in Laser Technology and Applications; 967110 (2015) https://doi.org/10.1117/12.2199664
Event: Applied Optics and Photonics China (AOPC2015), 2015, Beijing, China

Abstract

Grating is an important sensor widely used in CNC machine or equipment for length measurement with high precision. Special line scales with dense and micro lines are also widely used for the calibration of length measurement instrument. All the pitches of grating and spaces of dense lines of line scale are needed to be calibrated for a good measurement application. General methods for measurement of dense and micro lines include digital image processing method by CCD Microscope or line scanning method by AFM or SEM, and laser distraction method. There are some disadvantages to measure a long length grating with high precision and efficiently in these methods. A dynamic method based on Photoelectric Microscope is introduced, the lines of grating to be measured is moving uniformly when measuring, and the working distance is a bigger 65mm, the zoom of objective is low 10X. The principle of this dynamic method is discussed and the distortion of line signal is analyzed. The way to decrease the affection caused by distortion of line signal is also described. A special glass grating line scale with length 10mm, space 10μm and width 5μm is measured to verify the method. The measurement result and the uncertainty analysis demonstrate the expand measurement uncertainty (k=2) is less than 0.1μm.

Citation Download Citation

Hongtang Gao, Zhongyu Wang, and Hao Wang "A scanning measurement method of the pitch of grating based on photoelectric microscope", Proc. SPIE 9671, AOPC 2015: Advances in Laser Technology and Applications, 967110 (15 October 2015); https://doi.org/10.1117/12.2199664

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