Detection for flatness of large surface based on structured light

Wenyan He; Xuedong Cao; Kuang Long; Zhang Peng

doi:10.1117/12.2243409

27 September 2016 Detection for flatness of large surface based on structured light

Wenyan He, Xuedong Cao, Kuang Long, Zhang Peng

Proceedings Volume 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 96841W (2016) https://doi.org/10.1117/12.2243409
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

In order to get flatness of a large plane, this paper set up a measurement system, composed by Line Structured Light, imaging system, CCD, etc. Line Structured Light transmits parallel fringes at a proper angle onto the plane which is measured; the imaging system and CCD locate above the plane to catch the fringes. When the plane is perfect, CCD will catch straight fringes; however, the real plane is not perfect; according to the theory of projection, the fringes caught by CCD will be distorted by convex and concave. Extract the center of line fringes to obtain the distortion of the fringe, according to the functional relationship between the distortion of fringes and the height which is measured, then we will get flatness of the entire surface. Data from experiment approached the analysis of theory. In the simulation, the vertical resolution is 0.0075 mm per pixel when measuring a plane of 400mm×400mm, choosing the size of CCD 4096×4096, at the angle 85°. Helped by sub-pixel, the precision will get the level of submicron. There are two obvious advantages: method of surface sampling can increase the efficiency for auto-repairing of machines; considering the center of fringe is required mainly in this system, as a consequence, there is no serious demand for back light.

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Wenyan He, Xuedong Cao, Kuang Long, and Zhang Peng "Detection for flatness of large surface based on structured light", Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 96841W (27 September 2016); https://doi.org/10.1117/12.2243409

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KEYWORDS

Distortion

Structured light

Charge-coupled devices

Error analysis

Imaging systems

CCD cameras

Image processing

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