Interferometry measurement of parallel optical plate wavefront

Yi Yang; Huan Ren; Zhendong Shi; Yong Liu; Xu Liu; Quan Yuan; Xiaoyu Yang; Lin Zhang

doi:10.1117/12.2246099

27 September 2016 Interferometry measurement of parallel optical plate wavefront

Yi Yang, Huan Ren, Zhendong Shi, Yong Liu, Xu Liu, Quan Yuan, Xiaoyu Yang, Lin Zhang

Proceedings Volume 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment; 96843J (2016) https://doi.org/10.1117/12.2246099
Event: Eighth International Symposium on Advanced Optical Manufacturing and Testing Technology (AOMATT2016), 2016, Suzhou, China

Abstract

In this paper, a method is introduced to test wavefront aberration of parallel optical plate wavefront, which based on Fourier transform. When testing the wavefront aberration of parallel optical plate, there is multiple-surface interference which phase-shifting interferometry cannot handle with. With the help of wavelength-modulation phase-shifting interferometry and Fourier transform, this method can isolate the multiple-surface interference fringes in frequency domain. This paper expound the principle of the method, and analyze the key parameter of the testing method: the suitable cavity/thickness ratio and sampling frame number. A simulation experiment is set up to verify the accuracy of this method, then the comparison test with traditional method shows that the relative deviation between the two methods is ≤5%.

Citation Download Citation

Yi Yang, Huan Ren, Zhendong Shi, Yong Liu, Xu Liu, Quan Yuan, Xiaoyu Yang, and Lin Zhang "Interferometry measurement of parallel optical plate wavefront", Proc. SPIE 9684, 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test, Measurement Technology, and Equipment, 96843J (27 September 2016); https://doi.org/10.1117/12.2246099

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KEYWORDS

Wavefronts

Modulation

Optical testing

Fourier transforms

Interferometry

Wavefront aberrations

Phase interferometry

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