Synchronous scan-projection lithography for fabricating cylindrical micro-parts

Kaiki Ito; Yuta Suzuki; Toshiyuki Horiuchi

doi:10.1117/12.2240273

10 May 2016 Synchronous scan-projection lithography for fabricating cylindrical micro-parts

Kaiki Ito, Yuta Suzuki, Toshiyuki Horiuchi

Proceedings Volume 9984, Photomask Japan 2016: XXIII Symposium on Photomask and Next-Generation Lithography Mask Technology; 99840I (2016) https://doi.org/10.1117/12.2240273
Event: Photomask Japan 2016, 2016, Yokohama, Japan

Abstract

Lithographical patterning on the surface of a thin pipe is required for fabricating three-dimensional micro-parts. For this reason, a new exposure system for printing patterns on a cylindrical pipe by synchronous scan-projection exposure was developed. Using the exposure system, resist patterns with a width of 100 μm were printed on a surface of stainless-steel pipe with a diameter of 2 mm. The exposure time was 30 s. Printed resist pattern widths were measured in the axial and circumferential directions. As a result, pattern widths were almost uniform in both axial and circumferential directions. Judging from the experimental results, it was clarified that the patterning technology had a potential to be applied to fabrications of bio-medical devices and micro-parts.

Citation Download Citation

Kaiki Ito, Yuta Suzuki, and Toshiyuki Horiuchi "Synchronous scan-projection lithography for fabricating cylindrical micro-parts", Proc. SPIE 9984, Photomask Japan 2016: XXIII Symposium on Photomask and Next-Generation Lithography Mask Technology, 99840I (10 May 2016); https://doi.org/10.1117/12.2240273

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