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1 April 2022 High-speed additive manufacturing of metallic microstructures with topography on arbitrary substrates
Erik Waller, Georg von Freymann
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Proceedings Volume PC11988, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVII; PC119880E (2022) https://doi.org/10.1117/12.2607372
Event: SPIE LASE, 2022, San Francisco, California, United States
Abstract
A method to directly fabricate silver topographies with high fabrication throughput on arbitrary substrates is presented. The method is based on a laser induced photoreduction of a silver precursor and assisted by nucleation seeds, substrate functionalization and a multi-exposure fabrication scheme. In total, the novel photo-sensitive material and the novel fabrication scheme enable effective fabrication speeds of up to a centimeter per second. With this fabrication speed, the fabrication of silver topographies extending over several millimeters – e.g., components working in the THz frequency range - is now feasible and sample applications presented.
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Erik Waller and Georg von Freymann "High-speed additive manufacturing of metallic microstructures with topography on arbitrary substrates", Proc. SPIE PC11988, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVII, PC119880E (1 April 2022); https://doi.org/10.1117/12.2607372
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KEYWORDS
Additive manufacturing
Fabrication
Multiphoton lithography
Absorption
Materials processing
Photoresist materials
Photosensitive materials
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