Presentation
5 March 2022 UV spectrometer with <1mm3 volume
Author Affiliations +
Proceedings Volume PC12002, Oxide-based Materials and Devices XIII; PC120020Y (2022) https://doi.org/10.1117/12.2619159
Event: SPIE OPTO, 2022, San Francisco, California, United States
Abstract
We have fabricated a novel type of ultracompact spectrometer without dispersive element(s) suitable for the use in smartphones. It comprises a waveguide with a linear photodetector array on top. The photosensitive layer features a steep chemical concentration gradient, fabricated from (MgxZn1-x)O, allowing for spectral detection in the UV. The dimensions of the device make it ultracompact with a volume of less than 1 cubic millimeter.
Conference Presentation
© (2022) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Marius Grundmann, Max Kneiss, Anna Reinhardt, Chris Sturm, Holger von Wenckstern, Laurenz Thyen, Daniel Splith, and Lukas Trefflich "UV spectrometer with <1mm3 volume", Proc. SPIE PC12002, Oxide-based Materials and Devices XIII, PC120020Y (5 March 2022); https://doi.org/10.1117/12.2619159
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KEYWORDS
Spectroscopy

Ultraviolet radiation

Waveguides

Photodetectors

Absorption

Ellipsometry

Pulsed laser deposition

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