Nanoimprint process for scalable manufacture of silicon nitride metalenses

Andrew McClung; Mahsa Torfeh; Vincent J. Einck; James J. Watkins; Amir Arbabi

doi:10.1117/12.2608689

5 March 2022 Nanoimprint process for scalable manufacture of silicon nitride metalenses

Andrew McClung, Mahsa Torfeh, Vincent J. Einck, James J. Watkins, Amir Arbabi

Proceedings Volume PC12011, High Contrast Metastructures XI; PC120110V (2022) https://doi.org/10.1117/12.2608689
Event: SPIE OPTO, 2022, San Francisco, California, United States

Abstract

With high feature density and subwavelength dimensions, visible spectrum metalenses are challenging to scalably manufacture. Electron beam lithography and short-wavelength photolithography capable of patterning metalenses for the visible do so at high cost per wafer. Here, we present a low-cost and scalable fabrication process based on nanoimprint lithography, and use it to demonstrate metalenses designed for 550 nm light with 4 mm diameter and NA=0.2. Our metalenses are formed of silicon nitride nanoposts with critical dimensions smaller than 100 nm. In this presentation we report focusing efficiencies above 50%, share holographic characterization data, and demonstrate imaging.

Conference Presentation

Citation Download Citation

Andrew McClung, Mahsa Torfeh, Vincent J. Einck, James J. Watkins, and Amir Arbabi "Nanoimprint process for scalable manufacture of silicon nitride metalenses", Proc. SPIE PC12011, High Contrast Metastructures XI, PC120110V (5 March 2022); https://doi.org/10.1117/12.2608689

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available