Dynamic piezoelectric MEMS-based optical meta-grating with reconfigurable diffraction directions

Chao Meng; Paul C. V. Thrane; Fei Ding; Christopher A. Dirdal; Sergey I. Bozhevolnyi

doi:10.1117/12.2621017

24 May 2022 Dynamic piezoelectric MEMS-based optical meta-grating with reconfigurable diffraction directions

Chao Meng, Paul C. V. Thrane, Fei Ding, Christopher A. Dirdal, Sergey I. Bozhevolnyi

Proceedings Volume PC12130, Metamaterials XIII; PC1213004 (2022) https://doi.org/10.1117/12.2621017
Event: SPIE Photonics Europe, 2022, Strasbourg, France

Abstract

By combining the piezoelectric MEMS mirror with plasmonic OMSs, we successfully demonstrated an electrically driven MEMS-OMS platform for dynamic 2D wavefront shaping with high modulation efficiencies, broadband operation, and fast speed [2]. One functionality of particular interest to the commercial applications (e.g., LiDAR) is the possibility of switching between multiple diffraction orders to allow for quasi-continuous beam steering. To realize this suggested functionality, we randomly interleaved two meta-gratings optimized at two different air gaps with distinct grating periods of Λsc and 2 Λsc. In both simulations and experiments, polarization-independent reflection power redistributions between 0th, +1st, +2nd diffraction orders are visualized, corresponding to 0⁰, 7.6⁰, and 15.4⁰ reflection directions, under normal incidence. As a future perspective, on this MEMS-OMS platform, we foresee more versatile functionalities available, thanks to the plenty space of design freedom in both MEMS mirror and OMS sides. Currently, we are also working on other designs to explore other possibilities on this platform. [1] Meng, C., Thrane, P., Ding, F., Gjessing, J., Thomaschewski, M., Wu, C., Dirdal, C. & Bozhevolnyi, S. I. (2021). Dynamic piezoelectric MEMS-based optical metasurfaces. Science Advances, 7(26), eabg5639.

Conference Presentation

Citation Download Citation

Chao Meng, Paul C. V. Thrane, Fei Ding, Christopher A. Dirdal, and Sergey I. Bozhevolnyi "Dynamic piezoelectric MEMS-based optical meta-grating with reconfigurable diffraction directions", Proc. SPIE PC12130, Metamaterials XIII, PC1213004 (24 May 2022); https://doi.org/10.1117/12.2621017

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KEYWORDS

Diffraction

Microelectromechanical systems

Mirrors

Intelligence systems

Plasmonics

Wavefronts

Phase shift keying

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