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Mechanical displacement is one of the mechanisms that can be utilized for realizing tunable optical metasurfaces. We propose nano-electromechanically tunable metasurfaces based on slot mode resonances at telecom wavelength. Utilizing high aspect ratio silicon slabs that can bend towards each other on a substrate, we achieve a robust device that can cover large areas. Upon applying 40 V, the device can achieve 4 nm spectral shift which gives rise to a 70% amplitude modulation. At the cost of a higher power consumption, the proposed device is mechanically robust and can be used in beam steering, modulation and wavefront shaping.
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