Presentation
2 December 2022 Femtosecond pulse induced defects and laser induced periodic surface structures (LIPSS) in β-Ga203
Author Affiliations +
Abstract
Cathodoluminescence and electrostatic techniques were used to study the nanoscale spatial evolution of native defects, crystallinity and work function in Ga2O3 across different morphological regions in laser induced periodic surface structures generated by an ultrafast laser. An emergent ~2.4 eV emission, likely related to oxygen interstitials or divacancy complexes, inversely correlates with the crystallinity of these regions. A contrast in work functions between the rims and troughs of the LIPSS, indicative of periodic differences in defect concentration, correlates with a reduction of crystallinity in the rim region relative to the trough region, suggesting an increased concentration of relatively shallow defects.
Conference Presentation
© (2022) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Daram N. Ramdin, Emma DeAngelis, Mohamed Yaseen Noor, Micah S. Haseman, Leonard J. Brillson, and Enam Chowdhury "Femtosecond pulse induced defects and laser induced periodic surface structures (LIPSS) in β-Ga203", Proc. SPIE PC12300, Laser-Induced Damage in Optical Materials 2022, PC1230005 (2 December 2022); https://doi.org/10.1117/12.2641262
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KEYWORDS
Femtosecond phenomena

Pulsed laser operation

Crystals

Semiconductors

Ultrafast lasers

Laser induced damage

Microscopy

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