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9 March 2023 Electrically tunable silicon microring resonator array for on-chip wavelength division multiplexing
Wei-Che Hsu, Alan X. Wang
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Proceedings Volume PC12427, Optical Interconnects XXIII; PC124270B (2023) https://doi.org/10.1117/12.2657971
Event: SPIE OPTO, 2023, San Francisco, California, United States
Abstract
Silicon microring resonator (Si-MRR) plays an essential role in the scalable wavelength division multiplexing (WDM) device due to its ultra-compact size and low energy consumption. Typically, the resonant wavelength of the Si-MRR is controlled via the thermal heater with high power dissipation. Recently, a tunable Si-MRR heterogeneously integrated with high mobility transparent conducting oxide (HMTCO)/hafnium oxide insulator/Si metal-oxide-semiconductor (MOS) capacitor has demonstrated an alternative method to electrically tune the working wavelength with negligible power consumption. This talk will demonstrate a WDM cascaded with four HMTCO gated MOS Si-MRRs and show the large wavelength tuning range with high power efficiency.
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Wei-Che Hsu and Alan X. Wang "Electrically tunable silicon microring resonator array for on-chip wavelength division multiplexing", Proc. SPIE PC12427, Optical Interconnects XXIII, PC124270B (9 March 2023); https://doi.org/10.1117/12.2657971
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KEYWORDS
Wavelength division multiplexing
Microrings
Silicon
Resonators
Molybdenum
Temperature metrology
Transceivers
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