10 August 2023Results of uncertainty evaluation on the thickness and refractive index spectrum measurement of silicon dioxide thin film layer using a spectroscopic ellipsometer
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Yong Jai Cho,Won Chegal, andJunho Choi
"Results of uncertainty evaluation on the thickness and refractive index spectrum measurement of silicon dioxide thin film layer using a spectroscopic ellipsometer", Proc. SPIE PC12619, Modeling Aspects in Optical Metrology IX, PC126190D (10 August 2023); https://doi.org/10.1117/12.2673375
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Yong Jai Cho, Won Chegal, Junho Choi, "Results of uncertainty evaluation on the thickness and refractive index spectrum measurement of silicon dioxide thin film layer using a spectroscopic ellipsometer," Proc. SPIE PC12619, Modeling Aspects in Optical Metrology IX, PC126190D (10 August 2023); https://doi.org/10.1117/12.2673375