We demonstrated nonvolatile, electrically programmable, phase-only modulation of free-space infrared radiation in transmission based on low-loss phase change materials (PCMs) Sb2Se3. By coupling ultra-thin PCM to a high quality-factor (Q~406) diatomic metasurface, we demonstrated a phase-only modulation of ~0.25π (~0.2π) in simulation (experiment), ten times larger than without using the metasurface. The metasurface is robust against reversible switching over 1,000 times. Finally, we showed independent control of 17 meta-molecules, achieving ten deterministic resonance levels in a tunable notch filter with a maximum spectral shift of ~8nm. The independent control also allowed us to achieve varifocal lensing. This work paves way to a nonvolatile phase-only SLM.
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