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With the nearly full spatial coherence of X-ray free electron lasers comes unprecedented requirements on the precise figure of X-ray mirrors. For example, the Time-resolved AMO Instrument (TMO) requires a bendable Kirkpatrick-Baez (KB) mirror system in order to produce a range of focus spot sizes, while maintaining nm-level figure error across the corresponding range of elliptical shapes. Here we describe the process of TMO KB mirror characterization using optical metrology, the detailed comparison with at-wavelength wavefront sensors during instrument commissioning, and the implementation of an automatic focusing system that ties together the wavefront sensor output with the mirror bender controls.
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Matthew H. Seaberg, Lance Lee, May Ling Ng, William Lane, "The LCLS-II x-ray optical system: from metrology to routine operation," Proc. SPIE PC12695, Advances in Metrology for X-Ray and EUV Optics X, PC126950A (4 October 2023); https://doi.org/10.1117/12.2677199