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13 March 2024 Single lens dynamic z-scanning for simultaneous in-situ position detection and laser processing focus control
Xiaohan Du, Camilo Florian, Craig Arnold
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Proceedings Volume PC12872, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX; PC128720A (2024) https://doi.org/10.1117/12.3000413
Event: SPIE LASE, 2024, San Francisco, California, United States
Abstract
Existing auto-focusing methods in laser processing typically include two independent modules: surface detection and z-axis adjustment. The latter is mostly implemented by mechanical z-stage motion, which is up to three orders of magnitude slower than the lateral processing speed. To alleviate this processing bottleneck, we developed a single-lens approach, using only one high-speed z-scanning optical element, to accomplish both in-situ surface detection and focus control quasi-simultaneously in a dual-beam setup. Our approach provides instantaneous surface tracking by collecting position information and executing focal control both at 140-350 kHz, which significantly accelerates the z-alignment process and offers great potential for enhancing the speed of advanced manufacturing processes in three-dimensional space.
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(2024) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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Xiaohan Du, Camilo Florian, and Craig Arnold "Single lens dynamic z-scanning for simultaneous in-situ position detection and laser processing focus control", Proc. SPIE PC12872, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIX, PC128720A (13 March 2024); https://doi.org/10.1117/12.3000413
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KEYWORDS
Laser processing
Beam controllers
Optical alignment
Process control
Optical surfaces
Signal detection
Ultrafast phenomena
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