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9 March 2024 Far UV light generation by AlN-based wavelength conversion devices
Ryuji Katayama
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Proceedings Volume PC12886, Gallium Nitride Materials and Devices XIX; PC128860Q (2024) https://doi.org/10.1117/12.3001482
Event: SPIE OPTO, 2024, San Francisco, California, United States
Abstract
Novel wavelength conversion devices with a transverse quasi-phase matching principle, which can be operated even in the absence of birefringence and ferroelectricity, is proposed. The devices include polarity-inverted stacked multilayer of AlN waveguide fabricated using epitaxial polarity inversion techniques. The report on the successful demonstration of far-UV 229-nm-wavelength second harmonic generation as well as a variation of similar structures will be given in the presentation.
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Ryuji Katayama "Far UV light generation by AlN-based wavelength conversion devices", Proc. SPIE PC12886, Gallium Nitride Materials and Devices XIX, PC128860Q (9 March 2024); https://doi.org/10.1117/12.3001482
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KEYWORDS
Harmonic generation
Ultraviolet radiation
COVID 19
Fabrication
Lithography
Nonlinear optics
Optical properties
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